Gaya APA

Konuma, Mitsuharu. (2005). Plasma techniques for film deposition . : IG Library.

Gaya Chicago

Konuma, Mitsuharu. Plasma techniques for film deposition. : IG Library, 2005. Electronic Resources.

Gaya MLA

Konuma, Mitsuharu. Plasma techniques for film deposition. : IG Library, 2005. Electronic Resources.

Gaya Turabian

Konuma, Mitsuharu. Plasma techniques for film deposition. : IG Library, 2005. Electronic Resources.